Laboratory for Feasibility Studies
The INNOVAVENT
laboratories are equipped with optical systems for
creating line focus illumination. Pulsed ns lasers at 532 nm and cw diode
lasers at 808 nm are available for sample processing.
Three
clean rooms with a total
floor space of more than 850 sqf provide an excellent environment
for feasibility studies and development of laser based processes.
Our team has many years
of experience in laser annealing and crystallization of thin semiconductor
films and would be glad to discuss your application with you.
INNOVAVENT
uses lasers of the
JENOPTIK Laser, Optik, Systeme GmbH.
Laser
dopant activation on a silicon
waferclick here
INNOVAVENT
GmbH
Göttingen,
Germany
silicon crystals, created with modern disk laser, optics and process technology
