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Solid State Laser Annealing, Crystallization,
Dopant Activation and Lift-Off
INNOVAVENT – Laser-Optics-Systems
for crystallization, annealing and doping applications of semiconductors are of modular design and are developed in close cooperation with users and system integrators. The products range from low-budget optical systems to create a line focus up to complex laser optical subsystems including laser, homogenizing optics, imaging p-lens and beam diagnostics.
LCD and OLED displays take advantage of the
thin film transistor performance
to switch the display pixel matrix. Driver electronics, memory and CPU circuits can be directly produced on the glass substrate. Thin silicon films are transferred into the liquid phase and controlled solidification results in homogenous crystallization providing high electron/hole mobility.
UV-SLA (Solid State Laser Annealing)
regular grain structure.
regular grain structure.
Flat Top with 10µm 90/10% steepness.
Laser Lift-Off
Manufacturing of OLED displays on flexible PI-foils is
using Laser-Lift-Off. UV-solid-state lasers and VOLCANO UV optical systems from
INNOVAVENT are integrated into reliable and low cost-of-ownership production
equipment for the display industry using Laser-Lift-Off (LLO).