Laser-Lift-Off - INNOVAVENT Laseroptics

e-mail: info@innovavent.com - phone: +49 551-900 47-0

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Laser-Lift-Off

Systems > Laser-Lift-Off

Laser-Lift-Off
Die Herstellung von flexiblen OLED Displays auf Polymerfolien nutzt das Laser-Lift-Off-Verfahren. Festkörper-UV-Laser und optische Systeme VOLCANO UV von INNOVAVENT ermöglichen den Bau von zuverlässigen und kosteneffizienten Produktionsanlagen für Laser-Lift-Off (LLO) bzw. UV Laser Peeling (ULP).
The OLED display is manufactured on a polymer foil. This polymer foil is sealed to a glass substrate during the manufacturing process. After completion of the OLED display the polymer foil is removed from the glass by the Laser-Lift-Off process. The Laser-Lift-Off is using 343nm or 355nm UV laser light formed to a line geometry. This wavelength transmits through the glass substrate (typical 0,5mm thick) without attenuation and is absorbed in a thin “sacrifice layer” (50-60nm a-Si) or at the glass polymer interface. The absorbed pulsed energy results in a lift off of the polymer substrate from the glass without any damage to the display. The full display is scanned through the laser line and fully lifted off.

The glass substrates size starts from mobile display dimensions (100mm line length) up to Gen 6 (1500mm x 1850mm).

VOLCANO UV Laser Optics generate a laser line of 100mm to 750mm length and a width of 20-30µm FWHM. The line is focused on the polyimide through the glass at an energy density of 150-500mJ/cm² and scanned with a typical pitch of 10-20µm (scan speed 100-200mm/s). The TruMicro 7370 laser emits 15-20ns pulses at 10 kHz. When applying a sacrifice layer (50-60nm a-Si) between the glass and the polyimide higher energy density of up to 500mJ/cm2 is required.


lab
laser lift of prcesses
laser lift off processes
Gaussian fit to the short axis profile of the laser line beam
laser lift off processes
Long axis profile over 250mm of the laser line, p2p<=5%


Laser Optics for Laser Lift-Off Processes


Germany, Europa
INNOVAVENT GmbH
Reinhard-Rube Str. 4
37077 Göttingen, Germany
phone: +49-551-90047-0
fax:      +49-551-90047-19
e-mail: info@innovavent.com
www.innovavent.com


Germany, Europa
INNOVAVENT GmbH
Reinhard-Rube Str. 4
37077 Göttingen, Germany
phone: +49-551-90047-0
fax:      +49-551-90047-19
e-mail: info@innovavent.com
www.innovavent.com
Taiwan (ROC) and China (PRC)
SuperbIN Company. .Ltd
1F, No. 320, Sec. 1 Nei-Hu Road Taipei,
11493, Taiwan (ROC)
phone: +886-2-2657-0678
fax:      +559-2-2657-0388
e-mail: info@superbin.com.tw
www.superbin.com.tw
Japan Optopia Co. Ltd.
611 West Tower
Kanagawa Science Park
3-2-1 Sakato Taksutu Kawasaki
Kanagawa, Japan 213-0012
phone: +81 44 812 5911
fax:      +81 44 812 5921
www.optopia.co.jp
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Customer Support Center Germany for: EO Technics Co., Ltd. 91 Dongpyeonro Anyang, Korea 431-803
© 2003 - 2018 INNOVAVENT Laseroptics
Customer Support Center Germany for:
EO Technics Co., Ltd. 91 Dongpyeonro Anyang,
Korea 431-803
© 2003 - 2017 INNOVAVENT Laseroptics
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