Laser-Optics-Systems - INNOVAVENT Laseroptics

e-mail: info@innovavent.com - phone: +49 551-900 47-0

laserlabor
laserlabor
Go to content

Main menu:

Laser-Optics-Systems


Laser-Optics-Systems for Crystallization, Annealing, Activation and Lift Off
INNOVAVENT – Laser-Optics-Systems for crystallization, annealing and doping applications of semiconductors are of modular design and are developed in close cooperation with users and system integrators. The products range from low budget optical systems to create a line focus up to complex laser optical subsystems including laser, homogenizing optics, imaging p-lens and beam diagnostics.
Lava Laser Optics
VOLCANO LB 750UV-6, Line Beam Optics combining 4-6 TruMicro 7370 (180W, 10kHz, 15ns, 343nm)
VOLCANO® LB sketch showing laser, fiber coupling and Gaussian line beam optics module.
innovavent
50nm p-Si film SEM after 60ns
GLA processing @ 380mJ/cm²
VOLCANO® Laser Optics includes cylindrical focusing and imaging of Gaussian beams. Long lines up to 250 mm, as sharp as FWHM 10-50 µm in the scan axis. The cylindrical imaging is done by the INNOVAVENT FALCON® p-lens family. The VOLCANO® Laser Optics is operated with lasers emitting 515 nm, 532nm and UV 343nm and 355nm.
 
The VOLCANO® LINE BEAM Laser Optics create a Gaussian line beam of  20-50µm FWHM width and 300-750mm length, up to 1000mm.
 
High power green (532nm) DPSSL light is provided by fibers to the  line beam optics module G-version. This method allows multiplexing of laser light sources and obtaining an energy density of  >=500m J/cm² in a 750mm long line. The energy density in this line geometry converts 50-70nm a-Si films into p-Si for the manufacturing of LCD-TFT back plates.

Free space homogenizer optics based beam coupling is applied with 343nm UV lasers. The VOLCANO UV Laser optics is operated with a pulsed TruMicro 7370 UV laser. The pulsed UV laser light is well suited to lift off plastic films from glass plates such as used in flexible OLED displays. Further the 15ns, 343nm wavelength allows to prepare ELA like uniform p-Si film conversion from a-Si films for high resolution OLED TFT back plate displays.

The product group LAVA® Laser Optics employs a spherical imaging p-lens.
The CaF2 high performance p-lens EAGLE® plus provides thermal-lens-free diffraction limited 2-dimensional imaging of lines within a field of view of 10 mm. This p-Lens is available for 515nm/532nm and 1064nm (IR) and it can be operated with pulsed and cw lasers.
Germany, Europa
INNOVAVENT GmbH
Reinhard-Rube Str. 4
37077 Göttingen, Germany
phone: +49-551-90047-0
fax:      +49-551-90047-19
e-mail: info@innovavent.com
www.innovavent.com


Germany, Europa
INNOVAVENT GmbH
Reinhard-Rube Str. 4
37077 Göttingen, Germany
phone: +49-551-90047-0
fax:      +49-551-90047-19
e-mail: info@innovavent.com
www.innovavent.com
Taiwan (ROC) and China (PRC)
SuperbIN Company. .Ltd
1F, No. 320, Sec. 1 Nei-Hu Road Taipei,
11493, Taiwan (ROC)
phone: +886-2-2657-0678
fax:      +559-2-2657-0388
e-mail: info@superbin.com.tw
www.superbin.com.tw
Japan Optopia Co. Ltd.
611 West Tower
Kanagawa Science Park
3-2-1 Sakato Taksutu Kawasaki
Kanagawa, Japan 213-0012
phone: +81 44 812 5911
fax:      +81 44 812 5921
www.optopia.co.jp
laserlabor
laserlabor
Customer Support Center Germany for: EO Technics Co., Ltd. 91 Dongpyeonro Anyang, Korea 431-803
© 2003 - 2017 INNOVAVENT Laseroptics - Last Update: 2016 12 19
Customer Support Center Germany for:
EO Technics Co., Ltd. 91 Dongpyeonro Anyang,
Korea 431-803
© 2003 - 2017 INNOVAVENT Laseroptics
Back to content | Back to main menu