VOLCANO® 250UV Laser Optics - INNOVAVENT Laseroptics

e-mail: info@innovavent.com - phone: +49 551-900 47-0

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VOLCANO® 250UV Laser Optics

Systems > Laser-Lift-Off

 
Laser Optics for a Laser Line up to 250mm Length using Pulsed Solid State UV Lasers

Volcano 250
volcano 100UV
VOLCANO 250UV laser optics with two TruMicro 7370 343nm DPSSL
volcano 100UV-1
The VOLCANO® 250UV Laser Optics is built into a solid granite structure. Two laser beams can be combined to obtain high energy density. The beams are processed by independent telescopes and combined by a specially designed homogenizer. The combined laser beams are homogenized into a 250mm long line beam with a typical width of 20 - 30µm. The FALCON 250UV projection lens assures a uniform line width and the large depth of focus which trouble-free production requires. The 250mm long line provides >300mJ/cm² in a 30µm wide line with two TruMicro 7370.

Scope of Application

Laser lift-off (LLO) processes are in use in the electronics industry for the production of high brightness LEDs, a market with a fast growing volume due for instance to the increasing use of energy saving room illumination. Besides the production of LEDs, LLO processes experience an increas-ing demand for the production of flexible displays for TV products, smart-phones, smartwatches, tablet computers and electronic books. For these displays the functional film is produced on a rigid and flat glass sub-strates and subsequently transferred to a flexible carrier like a polymer foil by debonding it from the glass transport substrate.

Another application for LLO is the production of 3D stacked semicon-ductor devices. Devices manufactured on thin wafers of several 10µm thickness are stacked vertically. To process thin wafers they are often bonded to support carriers. Traditionally these carriers are silicon wafers. Debonding the thin device wafers from the thick support carriers after pro-cessing is a mechanical process during which a remarkable amount of mechanical stress is applied to the thin wafer. If the silicon carrier is replaced by a glass carrier, a laser lift-off process can be used which allows much gentler debonding with subsequently higher yield.
Technical Data VOLCANO® 250UV
Wavelength:
343 nm
Line length:
250mm (top-hat-Profil)
Line width:
20-30µm FWHM (Gaussian profile)
Homogeneity:
+/-6% (p2p~6 Sigma)
Energy density:
up to 330mJ/cm², up to 500mJ/cm² @ 20µm FWHM

Pulse duration:15-20ns FWHM, can be extended by delay trigger scheme
Repetition rate:
10kHz

Scan speed:
50 - 150mm/s, depending on substrate

Laser:
2x TruMicro 7370 (Trumpf Lasertechnik)

Diagnostics:
laser power meter, substrate power meter, substrate beam profiler, fast photodiode
Other line sizes and other configurations on request.
Germany, Europa
INNOVAVENT GmbH
Reinhard-Rube Str. 4
37077 Göttingen, Germany
phone: +49-551-90047-0
fax:      +49-551-90047-19
e-mail: info@innovavent.com
www.innovavent.com


Germany, Europa
INNOVAVENT GmbH
Reinhard-Rube Str. 4
37077 Göttingen, Germany
phone: +49-551-90047-0
fax:      +49-551-90047-19
e-mail: info@innovavent.com
www.innovavent.com
Taiwan (ROC) and China (PRC)
SuperbIN Company. .Ltd
1F, No. 320, Sec. 1 Nei-Hu Road Taipei,
11493, Taiwan (ROC)
phone: +886-2-2657-0678
fax:      +559-2-2657-0388
e-mail: info@superbin.com.tw
www.superbin.com.tw
Japan Optopia Co. Ltd.
611 West Tower
Kanagawa Science Park
3-2-1 Sakato Taksutu Kawasaki
Kanagawa, Japan 213-0012
phone: +81 44 812 5911
fax:      +81 44 812 5921
www.optopia.co.jp
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Customer Support Center Germany for: EO Technics Co., Ltd. 91 Dongpyeonro Anyang, Korea 431-803
© 2003 - 2017 INNOVAVENT Laseroptics - Last Update: 2016 12 19
Customer Support Center Germany for:
EO Technics Co., Ltd. 91 Dongpyeonro Anyang,
Korea 431-803
© 2003 - 2017 INNOVAVENT Laseroptics
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