VOLCANO® LB 100UVC Laser Otics - INNOVAVENT Laseroptics

e-mail: info@innovavent.com - phone: +49 551-900 47-0

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VOLCANO® LB 100UVC Laser Otics

Laser Optics for a Laser Line of 100mm Length using Pulsed Solid State UV Lasers
VOLCANO® Line Beam systems is designed for a  line lengths up to 100mm. The use of solid state lasers emitting UV light at 343nm reduces the operating costs and increases the uptime of production tools remarkably, compared to ELA systems using excimer lasers.
The LB systems are based on a rigid aluminum housing structure and the FALCON XL projection lens gives a working distance of >200mm. A stable and solid system structure is needed to support the line beam optics. Line Beam Optics includes a MBC (Manual Beam Control) camera system which allows to control and adjust position and angle of all laser emitted beams. The FALCON XL design contains one or two window which seals the optics from the process chamber and protects against contaminations from the process.
The energy density of > 500mJ/cm² is obtained by using 4 TruMicro 7370 (20mJ specification) with 100mm x 100µm FWHM line beam.

volcano lb 100uvc laser optics
VOLCANO LB 100UVC-4 configuration
Technical Data: VOLCANO® LB 100UVC-4
Wavelenght:
343 nm
Line length:
100mm (top-hat-Profil)
Line width:
up to 100µm FWHM (Gaussian profile)
Homogeneity:
<=3% (p2p ~ 6Sigma)
Energy density:
>=500mJ/cm² @ 100µm FWHM
Pulse duration:
15-20ns, can be extended by delay trigger scheme
Repetition rate:
10kHz
Laser:
4x TruMicro 7370 (Trumpf Lasertechnik)
Diagnostics:
laser power meter, substrate power meter, substrate beam profiler, fast photodiode
Other line sizes and other configurations on request.
VOLCANO® Laser Optics includes an integrated attenuator module to adjust the energy density at the substrate level. Power meter heads and a CCD camera based beam profile measurement tool are available.


Germany, Europa
INNOVAVENT GmbH
Reinhard-Rube Str. 4
37077 Göttingen, Germany
phone: +49-551-90047-0
fax:      +49-551-90047-19
e-mail: info@innovavent.com
www.innovavent.com


Germany, Europa
INNOVAVENT GmbH
Reinhard-Rube Str. 4
37077 Göttingen, Germany
phone: +49-551-90047-0
fax:      +49-551-90047-19
e-mail: info@innovavent.com
www.innovavent.com
Taiwan (ROC) and China (PRC)
SuperbIN Company. .Ltd
1F, No. 320, Sec. 1 Nei-Hu Road Taipei,
11493, Taiwan (ROC)
phone: +886-2-2657-0678
fax:      +559-2-2657-0388
e-mail: info@superbin.com.tw
www.superbin.com.tw
Japan Optopia Co. Ltd.
611 West Tower
Kanagawa Science Park
3-2-1 Sakato Taksutu Kawasaki
Kanagawa, Japan 213-0012
phone: +81 44 812 5911
fax:      +81 44 812 5921
www.optopia.co.jp
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Customer Support Center Germany for: EO Technics Co., Ltd. 91 Dongpyeonro Anyang, Korea 431-803
© 2003 - 2017 INNOVAVENT Laseroptics - Last Update: 2016 12 19
Customer Support Center Germany for:
EO Technics Co., Ltd. 91 Dongpyeonro Anyang,
Korea 431-803
© 2003 - 2017 INNOVAVENT Laseroptics
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