VOLCANO® LB 100UVC Laser Optics - INNOVAVENT Laseroptics

e-mail: info@innovavent.com - phone: +49 551-900 47-0

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VOLCANO® LB 100UVC Laser Optics

 
Laser Optics for a Laser Line of 100mm Length using Pulsed Solid State UV Lasers
VOLCANO® Line Beam systems is designed for a  line lengths up to 100mm. The use of solid state lasers emitting UV light at 343nm reduces the operating costs and increases the uptime of production tools remarkably, compared to ELA systems using excimer lasers.
The LB systems are based on a rigid aluminum housing structure and the FALCON XL projection lens gives a working distance of >200mm. A stable and solid system structure is needed to support the line beam optics. Line Beam Optics include a MBC (Manual Beam Control) camera system which allows to control and adjust position and angle of all laser emitted beams. The FALCON XL design contains one or two windows which seals the optics from the process chamber and protects against contaminations from the process.
The energy density up to 500mJ/cm² is obtained by using 4 TruMicro 7370 (20mJ specification) with 100mm x 100µm FWHM line beam.

volcano lb 100uvc laser optics
VOLCANO LB 100UVC-4 configuration
The new VOLCANO LB 100UVC-SLA Laser Optics was developed for UV Solid State Laser Annealing (SLA). INNOVAVENT could demonstrate in the application lab, that regular grain structures are obtained in a 50-70nm a-Si film with the 343nm pulsed Line Beam. The regular grain structure is mandatory in the manufacturing of Thin Film Transistors (TFT) for high resolution AMOLED displays.

  
SLA SEMs of a VOLCANO 100UVC processed a-Si film showing a regular grain structure
with a period about equal to the wavelength 343nm of the laser light (left overview, right detail)

The VOLCANO LB 100UVC includes the following module options:
 
 
Short Axis Flat Top (SAFT) optics
Gaussian Short Axis (GSA) optics
Polarization setting (in scan direction or in direction of the long axis or mixing long axis and scan direction)
Pulse Delay and Temporal Profile control
µ-Smoothing module (dynamic shift of long axis while scanning)
PISTAB (Peak Intensity Stabilization) module („real time“ compensation of slow laser power variation)


View into the line beam housing


Moving process chamber and substrate chuck


View on two TruMicro 7370 lasers, showing also the beam coupling modules


SAFT high power beam profile measurement


The INNOVAVENT application lab offers 5-50mm/s (0,5-5µm pitch at 10 kHz laser repetition rate) scan speed setting. Further the moving processing chamber provides N2 purging to create an O2 concentration lower than 20ppm at the substrate exposure area.

Technical Data: VOLCANO® LB 100UVC-4
Wavelenght:
343 nm
Line length:
100mm (top-hat-Profil)
Line width:
30 up to 100µm FWHM (Gaussian profile)
40 - 50µm FW 95% (Flat Top)
Homogeneity:
<=3% (p2p ~ 6Sigma)
Energy density:
up to 500mJ/cm² @ 100µm FWHM or 50µm FW 95% (Flat Top)
Pulse duration:
15-20ns, can be extended by delay trigger scheme
Repetition rate:
10kHz
Laser:
2 - 4x TruMicro 7370 (Trumpf Lasertechnik)
Diagnostics:
laser power meter, substrate power meter, substrate beam profiler, fast photodiode
Other line sizes and other configurations on request.
 
VOLCANO® Laser Optics include an integrated attenuator module to adjust the energy density at the substrate level. Power meter heads and a CCD camera based beam profile measurement tool are available.


Germany, Europa
INNOVAVENT GmbH
Reinhard-Rube Str. 4
37077 Göttingen, Germany
phone: +49-551-90047-0
fax:      +49-551-90047-19
e-mail: info@innovavent.com
www.innovavent.com
Germany, Europa
INNOVAVENT GmbH
Reinhard-Rube Str. 4
37077 Göttingen, Germany
phone: +49-551-90047-0
fax:      +49-551-90047-19
e-mail: info@innovavent.com
www.innovavent.com
Taiwan (ROC) and China (PRC)
SuperbIN Company. .Ltd
1F, No. 320, Sec. 1 Nei-Hu Road Taipei,
11493, Taiwan (ROC)
phone: +886-2-2657-0678
fax:      +559-2-2657-0388
e-mail: info@superbin.com.tw
www.superbin.com.tw
Japan Optopia Co. Ltd.
611 West Tower
Kanagawa Science Park
3-2-1 Sakato Taksutu Kawasaki
Kanagawa, Japan 213-0012
phone: +81 44 812 5911
fax:      +81 44 812 5921
www.optopia.co.jp
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Customer Support Center Germany for: EO Technics Co., Ltd. 91 Dongpyeonro Anyang, Korea 431-803
© 2003 - 2018 INNOVAVENT Laseroptics
Customer Support Center Germany for:
EO Technics Co., Ltd. 91 Dongpyeonro Anyang,
Korea 431-803
© 2003 - 2018 INNOVAVENT Laseroptics
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