VOLCANO® LB 750UV Laser Optics - INNOVAVENT Laseroptics

e-mail: info@innovavent.com - phone: +49 551-900 47-0

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VOLCANO® LB 750UV Laser Optics

Systems > Laser-Lift-Off

 
Laser Optics for a Laser Line of 300 - 1000mm Length using Pulsed Solid State UV Lasers

VOLCANO 750UV-6 Laser Optics for 6x TruMicro 7370 UV Solidstate Laser
VOLCANO 750UV-6 Laser Optics for 6x TruMicro 7370 UV Solidstate Laser
 
VOLCANO® Line Beam systems can be designed with different line lengths up to 750mm and 1000mm. The use of solid state lasers emitting UV light at 343nm reduces the operating costs and increases the uptime of production tools remarkably, compared to ELA systems using excimer lasers.

The LB systems are based on a rigid aluminum housing structure and the FALCON XXL projection lens gives a working distance of >200mm. A stable and solid system structure is needed to support the line beam optics. Line Beam Optics includes a MBC (Manual Beam Control) camera system which allows to control and adjust position and angle of all laser emitted beams. The FALCON XXL design contains a window which seals the optics from the process chamber and protects against contaminations from the process.
 
The energy density of 500mJ/cm² is obtained by using 6 TruMicro 7370 (20mJ specification) with 750mm x 20µm FWHM line beam. The Line Beam optics gives a DoF>160µm with DC-optics and ≥ 300µm with DC +- opticts for a 20µm FWHM small axis and a uniformity of p2p ≤ 10%.


Technical Data: VOLCANO® LB 750UV-4
Wavelenght:
343 nm
Line length:
750mm (top-hat-Profil)
Line width:
20-30µm FWHM (Gaussian profile)
Homogeneity:
p2p ≤ 6% best focus
Energy density:
> = 330mJ/cm²@ 20µm FWHM; > = 210mJ/cm² @ 30µm FWHM
Pulse duration:
15-20ns, can be extended by delay trigger scheme
Repetition rate:
10kHz
Laser:
4x TruMicro 7370 (Trumpf Lasertechnik)
Diagnostics:
laser power meter, substrate power meter, substrate beam profiler, fast photodiode
Other line sizes and other configurations on request.
Technical Data: VOLCANO® LB 750UV-6
Wavelenght:
343 nm
Line length:
750mm (top-hat-Profil)
Line width:
20-30µm FWHM (Gaussian profile)
Homogeneity:
p2p ≤ 6% best focus
Energy density:
>=500mJ/cm² @ 20µm FWHM; >= 320mJ/cm² @ 30µm FWHM
Pulse duration:
15-20ns, can be extended by delay trigger scheme
Repetition rate:
10kHz
Laser:
6x TruMicro 7370 (Trumpf Lasertechnik)
Diagnostics:
laser power meter, substrate power meter, substrate beam profiler, fast photodiode
Other line sizes and other configurations on request.

VOLCANO® Laser Optics includes an integrated attenuator module to adjust the  energy density at the substrate level. Power meter  heads and a CCD camera based beam profile measurement tool are available.





Germany, Europa
INNOVAVENT GmbH
Reinhard-Rube Str. 4
37077 Göttingen, Germany
phone: +49-551-90047-0
fax:      +49-551-90047-19
e-mail: info@innovavent.com
www.innovavent.com
Germany, Europa
INNOVAVENT GmbH
Reinhard-Rube Str. 4
37077 Göttingen, Germany
phone: +49-551-90047-0
fax:      +49-551-90047-19
e-mail: info@innovavent.com
www.innovavent.com
Taiwan (ROC) and China (PRC)
SuperbIN Company. .Ltd
1F, No. 320, Sec. 1 Nei-Hu Road Taipei,
11493, Taiwan (ROC)
phone: +886-2-2657-0678
fax:      +559-2-2657-0388
e-mail: info@superbin.com.tw
www.superbin.com.tw
Japan Optopia Co. Ltd.
611 West Tower
Kanagawa Science Park
3-2-1 Sakato Taksutu Kawasaki
Kanagawa, Japan 213-0012
phone: +81 44 812 5911
fax:      +81 44 812 5921
www.optopia.co.jp
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Customer Support Center Germany for: EO Technics Co., Ltd. 91 Dongpyeonro Anyang, Korea 431-803
© 2003 - 2018 INNOVAVENT Laseroptics
Customer Support Center Germany for:
EO Technics Co., Ltd. 91 Dongpyeonro Anyang,
Korea 431-803
© 2003 - 2018 INNOVAVENT Laseroptics
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