VOLCANO® LB 750UVC Laser Optics - INNOVAVENT Laseroptics

e-mail: info@innovavent.com - phone: +49 551-900 47-0

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VOLCANO® LB 750UVC Laser Optics


 
Laser Optics for a Laser Line of 300 - 750mm Length using Pulsed Solid State UV Lasers

volcano lb 750uv-4

VOLCANO® Line Beam systems can be designed with different line lengths up to 750mm. The use of solid state lasers emitting UV light at 343nm reduces the operating costs and increases the uptime of production tools remarkably, compared to ELA systems using excimer lasers.

The LB systems are based on a rigid aluminum housing structure and the FALCON XXL projection lens gives a working distance of >200mm. A stable and solid system structure is needed to support the line beam optics. Line Beam Optics includes a MBC (Manual Beam Control) camera system which allows to control and adjust position and angle of all laser emitted beams. The FALCON XXL design contains a window which seals the optics from the process chamber and protects against contaminations from the process.

The energy density of 500mJ/cm² is obtained by using 6 TruMicro 7370 (20mJ specification) with 750mm x 20µm FWHM line beam.

volcano lb750uvc-6
VOLCANO LB 750UVC-6 Konfiguration mit “µ-smoothing mirror” Option
volcano lb 750 uv
VOLCANO 750UV-6 Laser Optics for 6x TruMicro 7370 UV Solidstate Laser
volcano lb 750 uv
VOLCANO 750UV-6 Laser Optics for 6x TruMicro 7370 UV Solidstate Laser

Scope  of Application
VOLCANO® Laser Optics provides a gaussian laser line applied for annealing  and crystallization of thin semiconductor film, e.g. amorphous silicon films.  Thin 50 nm a-Si films play an important role for the manufacture of thin film transistors (TFT) in LCD and OLED flat panel displays. UV crystallization converts the silicon to  poly-Si which allows short response time TFTs for high performance flat panel  displays. These films are well suited for the TFT matrix of OLED displays. VOLCANO® Laser Optics has high availability (>90 %), is reliable  and has low cost of ownership.

Technical Data: VOLCANO® LB 750UVC-4
Wavelenght:
343 nm
Line length:
750mm (top-hat-Profil)
Line width:
20-30µm FWHM (Gaussian profile)
Homogeneity:
<=3% (p2p ~ 6Sigma)
Energy density:
>=300mJ/cm² @ 20µm FWHM
Pulse duration:
15-20ns, can be extended by delay trigger scheme
Repetition rate:
10kHz
Laser:
4x TruMicro 7370 (Trumpf Lasertechnik)
Diagnostics:
laser power meter, substrate power meter, substrate beam profiler, fast photodiode
Other line sizes and other configurations on request.
Technical Data: VOLCANO® LB 750UVC-6
Wavelenght:
343 nm
Line length:
750mm (top-hat-Profil)
Line width:
20-30µm FWHM (Gaussian profile)
Homogeneity:
<=3% (p2p ~ 6Sigma)
Energy density:
>=300mJ/cm² @ 30µm FWHM, >=500mJ/cm² @ 20µm FWHM
Pulse duration:
15-20ns, can be extended by delay trigger scheme
Repetition rate:
10kHz
Laser:
6x TruMicro 7370 (Trumpf Lasertechnik)
Diagnostics:
laser power meter, substrate power meter, substrate beam profiler, fast photodiode
Other line sizes and other configurations on request.

VOLCANO® Laser Optics includes an integrated attenuator module to adjust the  energy density at the substrate level. Power meter heads, a CCD camera based beam profile measurement are available.





Germany, Europa
INNOVAVENT GmbH
Reinhard-Rube Str. 4
37077 Göttingen, Germany
phone: +49-551-90047-0
fax:      +49-551-90047-19
e-mail: info@innovavent.com
www.innovavent.com


Germany, Europa
INNOVAVENT GmbH
Reinhard-Rube Str. 4
37077 Göttingen, Germany
phone: +49-551-90047-0
fax:      +49-551-90047-19
e-mail: info@innovavent.com
www.innovavent.com
Taiwan (ROC) and China (PRC)
SuperbIN Company. .Ltd
1F, No. 320, Sec. 1 Nei-Hu Road Taipei,
11493, Taiwan (ROC)
phone: +886-2-2657-0678
fax:      +559-2-2657-0388
e-mail: info@superbin.com.tw
www.superbin.com.tw
Japan Optopia Co. Ltd.
611 West Tower
Kanagawa Science Park
3-2-1 Sakato Taksutu Kawasaki
Kanagawa, Japan 213-0012
phone: +81 44 812 5911
fax:      +81 44 812 5921
www.optopia.co.jp
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Customer Support Center Germany for: EO Technics Co., Ltd. 91 Dongpyeonro Anyang, Korea 431-803
© 2003 - 2017 INNOVAVENT Laseroptics - Last Update: 2016 12 19
Customer Support Center Germany for:
EO Technics Co., Ltd. 91 Dongpyeonro Anyang,
Korea 431-803
© 2003 - 2017 INNOVAVENT Laseroptics
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