VOLCANO® semi IGBT Laser Optics - INNOVAVENT Laseroptics

e-mail: info@innovavent.com - phone: +49 551-900 47-0

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VOLCANO® semi IGBT Laser Optics


Laser Optics for 515nm IGBT Laser Backside Annealing
Laser activation of bonded IGBT.
Activated Boron and Phosphorous dopant measured by SRP (courtesy FhI ISIT, Itzehoe).
The VOLCANO® Laser Optics in combination with the JenLas® ASAMA laser is especially suited for activation of IGBT emitter and field stop layers. The pulse duration of the JenLas® ASAMA laser is selected for deep activation of the dopants and simultaneously prevents damage to the wafer front side or a protection tape. The depth of the activation process is precisely controlled by selecting the laser beam parameters pulse duration, line width and scan speed. The Phosphorous fieldstop layer can be activated up to 2 µm deep. The VOLCANO® Laser Optics is either operated with a single or with two homogenizer coupled JenLas® ASAMA 80-8 thin disk solid state lasers, depending on throughput requirements.

Scope of Application
IGBT´s (insulated gate bipolar transistors) are processed on thinned wafers with a thickness of 100µm or less. Often these thinned wafers are mechanically stabilized by using the so-called TAIKO grinding process (DISCO Corp., Japan) and a protection tape on the already processed front side. This tape is not compatible with high process temperatures. If the activation is performed with the VOLCANO® semi IGBT Laser Optics, an activation rate of >75% can be achieved for both, the fieldstop and the emitter layer. The tape stays intact during this high temperature process.

Features
VOLCANO® semi IGBT Laser Optics:
1 or 2 JenLas® ASAMA 80-8 combined with FALCON® line beam optics.



Technical Data

Line length:
3 - 6 mm (FWHM)
Homogeneity:
6 sigma <=5 %
Wavelength
515 nm
Line width:
30 - 40 µm FWHM typical
Energy density:
max. 5,000 mJ/cm²
Pulse duration:
variable 300-1.200ns (300-3.000 ns with VOLCANO® 160)
Laser:
1 resp. 2 JenLas® ASAMA 80-8, 80 W @ 10 kHz
Beam profile measurement:
CCD Camera with microscope objective



VOLCANO® Laser Optics includes an integrated attenuator module to adjust the energy density at the substrate level. A very fast AOM (acousto-optical modulator) based shutter allows single pulse selection. Power meter heads and a CCD camera based beam profile measurement are available. VOLCANO® Laser Optics has high availability (>90 %), is reliable and has low cost of ownership.

Delivery Restrictions
The JenLas® ASAMA laser is a dual-use good according to EG 428/2009 and EG 1232/2011.
Germany, Europa
INNOVAVENT GmbH
Reinhard-Rube Str. 4
37077 Göttingen, Germany
phone: +49-551-90047-0
fax:      +49-551-90047-19
e-mail: info@innovavent.com
www.innovavent.com


Germany, Europa
INNOVAVENT GmbH
Reinhard-Rube Str. 4
37077 Göttingen, Germany
phone: +49-551-90047-0
fax:      +49-551-90047-19
e-mail: info@innovavent.com
www.innovavent.com
Taiwan (ROC) and China (PRC)
SuperbIN Company. .Ltd
1F, No. 320, Sec. 1 Nei-Hu Road Taipei,
11493, Taiwan (ROC)
phone: +886-2-2657-0678
fax:      +559-2-2657-0388
e-mail: info@superbin.com.tw
www.superbin.com.tw
Japan Optopia Co. Ltd.
611 West Tower
Kanagawa Science Park
3-2-1 Sakato Taksutu Kawasaki
Kanagawa, Japan 213-0012
phone: +81 44 812 5911
fax:      +81 44 812 5921
www.optopia.co.jp
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Customer Support Center Germany for: EO Technics Co., Ltd. 91 Dongpyeonro Anyang, Korea 431-803
© 2003 - 2017 INNOVAVENT Laseroptics - Last Update: 2016 12 19
Customer Support Center Germany for:
EO Technics Co., Ltd. 91 Dongpyeonro Anyang,
Korea 431-803
© 2003 - 2017 INNOVAVENT Laseroptics
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