Laser-Optics-Systems for Crystallization, Annealing and Activation

INNOVAVENT – Laser-Optics-Systems for crystallization, annealing and doping applications of semiconductors are of modular design and are developed in close cooperation with users and system integrators. The products range from low-budget optical systems to create a line focus up to complex laser optical subsystems including laser, homogenizing optics, imaging p-lens and beam diagnostics.

VOLCANO® Laser Optics includes cylindrical focusing and imaging of Gaussian beams. Long lines up to 200 mm, as sharp as FWHM <10 µm in the scan axis, provide a typical blur of 0.1-1 mm in the long dimension. The cylindrical imaging is done by the INNOVAVENT FALCON® p-lens family.
The VOLCANO® Laser Optics is operated with the 515 nm JenLas®  ASAMA 80-8. This laser allows to adjust the pulse length between 300 ns and 1,200 ns by software setting and its beam properties are optimum to form a laser line.

The new VOLCANO® LINE BEAM Laser Optics creates a Gaussian line beam of  >=20µm FWHM width and up to 750mm length. High power green (532nm) DPSSL light is provided by fibers to the  line beam optics module. This method allows multiplexing of laser light sources (Starlase 200G and 400G, Powerlaser Ltd., UK) and obtaining an energy density of  >=500mJ/cm² in a 750mm long line. This line geometry is well suited to prepare ELA like (Excimer Laser Annealing) p-Si films for the manufacturing of OLED and LCD-TFT back plates.

The second product group, LAVA® Laser Optics, employs the high repetition-rate 515 nm JenLas® ASAMA 100 -1 operated at 50 kHz or 100 kHz at low pulse energy (1 mJ oder 2 mJ). The pulse length setting is limited within 300 ns to 600 ns. LAVA® Laser Optics always includes a spherical imaging p-lens. The CaF2 high performance p-lens EAGLE®plus is a key module, which provides thermal-lens-free diffraction limited 2-dimensional imaging of lines within a field of view of 10 mm.


The LAVA® CW Laser Optics was introduced in 2009. These set ups include the CaF2 EAGLE®plus p-lens and the continuous wave JenLas® D2 laser technology. The second harmonic 532 nm Nd: vanadate thin disk laser emits up to 8 W multimode light power. Up to 160 W modules are configured by multiplexing and optical fiber transport provides the beam to homogenizer optics to form a laser line. The LAVA® CW Laser Optics provides very high power stability and homogeneity in the Gaussian line focus.LAVA 64CW: 64 W, 100 kW/cm², 1.2 mm line length, FWHM=30-35 µm, 1 σ <=1.5 % homogeneity.

 

 

 

 

 

 

 

 

 

 

 

 

LAVA Laser Optics sketchm DPSSL)
LAVA® Laser Optics sketch

 

LAVA Laser Optics sketchm DPSSL)

 

 

 

 

 

 

 

 

VOLCANO® LB sketch showing laser, fiber coupling and
Gaussian line beam optics module.

 

LAVA Laser Optics sketchm DPSSL)

 

 

 

 

 

 

 

 

50nm p-Si film SEM after 60ns GLA
processing @ 380mJ/cm²

 

 

 

 

 

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