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Laser-Optics-Systems for Crystallization, Annealing and ActivationINNOVAVENT – Laser-Optics-Systems for crystallization, annealing and doping applications of semiconductors are of modular design and are developed in close cooperation with users and system integrators. The products range from low-budget optical systems to create a line focus up to complex laser optical subsystems including laser, homogenizing optics, imaging p-lens and beam diagnostics. |
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VOLCANO® Laser Optics includes cylindrical focusing and imaging of Gaussian beams. Long lines up to 200 mm, as sharp as FWHM <10 µm in the scan axis, provide a typical blur of 0.1-1 mm in the long dimension. The cylindrical imaging is done by the INNOVAVENT FALCON® p-lens family. The new VOLCANO® LINE BEAM Laser Optics creates a Gaussian line beam of >=20µm FWHM width and up to 750mm length. High power green (532nm) DPSSL light is provided by fibers to the line beam optics module. This method allows multiplexing of laser light sources (Starlase 200G and 400G, Powerlaser Ltd., UK) and obtaining an energy density of >=500mJ/cm² in a 750mm long line. This line geometry is well suited to prepare ELA like (Excimer Laser Annealing) p-Si films for the manufacturing of OLED and LCD-TFT back plates.
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![]() LAVA® Laser Optics sketch
VOLCANO® LB sketch showing laser, fiber coupling and
Gaussian line beam optics module.
50nm p-Si film SEM after 60ns GLA
processing @ 380mJ/cm²
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| INNOVAVENT GmbH • Bertha-von-Suttner-Str. 5 • 37085 Göttingen Germany • Tel. +49 (0) 5 51 - 9 00 47-0 Fax +49 (0) 5 51 - 9 00 47-19 info@innovavent.com | |||||||||||||||||||||||||||
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