SEMI Field Beam
Our laboratory systems are your options. Do you want to develop a new laser process or procure a system, but are still unsure about the exact specifications? We have demo systems for various laser processes in our laboratory that can be used for your development. We can realise practical setups for new processes and carry out measurements and test exposures in order to determine the optimum process parameters for your requirements. This allows us to develop a customised solution that is tailored to your needs.
Beam Shapers and Homogenizers
Beam shapers are the core components of our optical systems: homogenizers convert the beam profile of a laser into a line-shaped or box-shaped top hat profile to achieve uniform energy distribution on the workpiece.
Innovavent relies on robust beam shaping technology based on splitting and superimposing the beam profile. This achieves an extremely homogeneous top hat profile with minimal residual deviations, even with non-ideal input profiles. The homogenizers can be used for geometric coupling of multiple lasers, resulting in a significant increase in available energy density or productivity in the process. Thanks to this technology, many demanding processing steps have become feasible on larger surfaces for the first time.
We also design and manufacture homogenizer systems according to customer specifications for various laser types.
Projection Optics
Excellent projection optics are the basis for precise laser processing – that's why we insist on uncompromising quality. Our systems use advanced optical designs and components that undergo rigorous testing to ensure maximum performance and reliability. Each optic is carefully checked for precision and quality before being integrated into our laser systems.
In addition to our standard projection optics for line beam and field systems, we develop high-performance projection optics for extreme requirements: large projection fields, outstanding resolution and low distortion, high pulse power and thermal stability even at kW laser power.
For integrated solutions, we offer high-quality replacement optics that ensure a long service life for your systems. Thanks to our many years of experience and consistent adherence to strict controls, we guarantee consistent performance in demanding industrial applications. The optimally matched coatings ensure high efficiency, durability, and maximum operational reliability. Our technologies combine innovation, precision, and process reliability for outstanding laser applications.
Optomechanics
Our opto-mechanical components guarantee maximum stability and precise adjustment options for demanding applications. Each mechanism is specially tailored to the optics used in order to guarantee maximum stability and reliability. Close cooperation between experienced designers and our development department results in sophisticated designs that combine technical perfection and user-friendliness. Different sizes and configurations ensure that every system is equipped with the ideal mechanics. Our solutions are designed to enable long-term and stable use, even under challenging conditions. Careful manufacturing and precise coordination of all components ensure optimum functionality, stability and durability.
Metrology
Precise process monitoring is crucial for quality assurance and the optimization of production processes. It facilitates the fine-tuning of systems during commissioning and enables efficient troubleshooting. By detecting deviations at an early stage, major downtimes can be avoided and productivity increased. Our measurement methods are continuously developed to meet the requirements of the industry. Real-time monitoring guarantees precise analysis and quick adjustments during operation. We offer different measurement variants, tailored to specific applications and industries. The combination of high-resolution sensor technology and intelligent data processing ensures maximum accuracy.
VOLCANO Semi
The VOLCANO semi-optical systems provide a high-energy line beam with up to > 5J/cm², which enables the demanding processes in semiconductor production. Multi-laser systems with several wavelengths (IR, green, UV) provide a superimposed beam profile that optimally utilizes the properties of the beam sources for the process. The systems are used in a variety of applications in micro- and power electronics such as dopant activation, CMOS image sensor manufacturing and ohmic contact formation for SiC. Integrated process monitoring ensures high process quality and reliability.
Special Developments
Innovavent develops customised solutions for demanding applications. Our focus is precision and innovation in order to master technological challenges efficiently. By working closely with our customers, we develop customised concepts that are precisely tailored to specific requirements. In doing so, we go beyond conventional limits and create cutting-edge technical solutions. Our development processes are characterised by continuous optimisation and agile procedures. With an interdisciplinary team of experts, we combine technology, creativity and engineering skills. This results in pioneering developments that set new standards and enable long-term value creation.
VOLCANO Linebeam
The VOLCANO LineBeam optical systems set new standards in the laser processing of large surfaces and offer maximum precision for industrial applications. We have been continuously developing our systems since 2008 to meet the increasing demands of industry. The anamorphic optics system is powered by one or more high-power solid-state lasers with up to >2500W from IR to UV combined. With flexible system sizes and laser line lengths from <2 to >1000 mm, we guarantee maximum adaptability for a wide range of production requirements. The beam profiles of the focussed axis are available as Gaussian or flattop profiles from 25 µm to 100 µm with a high depth of focus. Thanks to motorised zoom telescopes, the beam width can be variably and continuously adjusted to enable high power densities or high productivity. Integrated monitoring functions ensure maximum process control and high operational reliability.
The different variants are optimally adapted to production processes such as solid state laser annealing (SLA), laser lift-off (LLO), wafer annealing (WA) and laser cleaning (LC). With our advanced technology, we support companies in optimising their production processes and increasing production quality
