VOLCANO® 100UV Laser Optics - INNOVAVENT Laseroptics

e-mail: info@innovavent.com - phone: +49 551-900 47-0

laserlabor
laserlabor
Navigation
Navigation
Navigation
Navigation
Go to content

VOLCANO® 100UV Laser Optics

Systems > Laser-Lift-Off

Laser Optics for a Laser Line of 100mm Length using Pulsed Solid State UV Lasers

VOLCANO 100UV laser optics for the TruMicro 7370 UV DPSSL
The VOLCANO® 100UV Laser Optics is built into a solid granite structure. The beam is homogenized into a 100mm long line beam with a typical width of 20 - 30µm. The FALCON 100UV projection lens assures a uniform line width and the large depth of focus which trouble-free production requires. A single TruMicro 7370 laser (180W, 10 kHz, 15-17ns) provides 18mJ pulse energy and gives an energy density of more than 400mJ/cm² in a 30µm FWHM line width, respectively the width can be expanded to 80µm for 150mJ/cm². Using a typical scan pitch of 50% of the FWHM the scan speed goes up to 400mm/s. Alternative laser sources operated at 355nm can be applied as well. However, the longer pulse duration of 50-70ns requires increased process energy density.

Scope of Application

Laser-Lift-Off processes are in use in the electronics industry for the production of flexible OLED displays for TV products, smartphones, smartwatches and tablet computers. The OLED display is manufactured on a flexible polymer foil on a glass substrate. The final polymer foil with the OLED display is lifted off the glass using the UV laser line.
Technical Data VOLCANO® 100UV-1
Wavelength:
343 nm
Line length:
100mm (top-hat-Profil)
Line width:
20-30µm FWHM (Gaussian profile)
Homogeneity:
p2p ≤ 6% best focus
Energy density:
630mJ/cm² @ 20µm FWHM; ≥ 420mJ/cm² @ 30µm FWHM
Pulse duration:
15-20ns FWHM
Repetition rate:
10kHz

Laser:
TruMicro 7370 (Trumpf Lasertechnik)

Diagnostics:
laser power meter, substrate power meter, substrate beam profiler, fast photodiode
Other line sizes and other configurations on request.
Germany, Europa
INNOVAVENT GmbH
Reinhard-Rube Str. 4
37077 Göttingen, Germany
phone: +49-551-90047-0
fax:      +49-551-90047-19
e-mail: info@innovavent.com
www.innovavent.com
Germany, Europa
INNOVAVENT GmbH
Reinhard-Rube Str. 4
37077 Göttingen, Germany
phone: +49-551-90047-0
fax:      +49-551-90047-19
e-mail: info@innovavent.com
www.innovavent.com
Taiwan (ROC) and China (PRC)
SuperbIN Company. .Ltd
1F, No. 320, Sec. 1 Nei-Hu Road Taipei,
11493, Taiwan (ROC)
phone: +886-2-2657-0678
fax:      +559-2-2657-0388
e-mail: info@superbin.com.tw
www.superbin.com.tw
Japan Optopia Co. Ltd.
611 West Tower
Kanagawa Science Park
3-2-1 Sakato Taksutu Kawasaki
Kanagawa, Japan 213-0012
phone: +81 44 812 5911
fax:      +81 44 812 5921
www.optopia.co.jp
laserlabor
laserlabor
Customer Support Center Germany for: EO Technics Co., Ltd. 91 Dongpyeonro Anyang, Korea 431-803
© 2003 - 2018 INNOVAVENT Laseroptics
Customer Support Center Germany for:
EO Technics Co., Ltd. 91 Dongpyeonro Anyang,
Korea 431-803
© 2003 - 2018 INNOVAVENT Laseroptics
Back to content