VOLCANO® 300UV Laser Optics
Systems > Laser-Lift-Off
Laser Optics for a Laser Line up to 300mm Length using Pulsed Solid State UV Lasers
VOLCANO 300UV laser optics with two TruMicro 8320 or a single TruMicro 8340.
The VOLCANO® 300UV Laser Optics is built into a solid granite structure. Two laser beams can be combined to obtain high energy density. The beams are processed by independent telescopes and combined by a specially designed homogenizer. The combined laser beams are homogenized into a 300mm long line beam with a typical width of 20 - 30µm. The FALCON 300UV projection lens assures a uniform line width and the large depth of focus which trouble-free production requires.
Scope of Application
Laser-Lift-Off processes are in use in the electronics industry for the production of flexible OLED displays for TV products, smartphones, smartwatches and tablet computers. The OLED display is manufactured on a flexible polymer foil on a glass substrate. The final polymer foil with the OLED display is lifted off the glass using the UV laser line.
20µm FWHM Gaussian small axis
300mm long axis beam profile
| Technical Data VOLCANO® 300UV - 8320 | ||
| Wavelength: | 343 nm | |
| Line length: | 300mm (top-hat-profile) | |
| Line width: | 20µm FWHM (Gaussian profile) | |
| Homogeneity: | p2p ≤ 6% best focus | |
DoF: | ≥ 140µm for p2p ≤ 10% | |
| Energy density: | ≥ 230mJ/cm² @ 20µm FWHM | |
| Pulse duration: | 15-20ns FWHM, can be extended by delay trigger scheme | |
| Repetition rate: | 10kHz | |
Laser: | TruMicro 3820 (Trumpf Lasertechnik) | |
Diagnostics: | laser power meter, substrate power meter, substrate beam profiler, fast photodiode | |
| Technical Data VOLCANO® 300UV - 8340 | ||
| Wavelength: | 343 nm | |
| Line length: | 300mm (top-hat-profile) | |
| Line width: | 30µm FWHM (Gaussian profile) | |
| Homogeneity: | p2p ≤ 6% best focus | |
DoF: | ≥ 300µm for p2p ≤ 10% | |
| Energy density: | 310mJ/cm² @ 30µm FWHM | |
| Pulse duration: | 15-20ns FWHM, can be extended by delay trigger scheme | |
| Repetition rate: | 10kHz | |
Laser: | TruMicro 3840 (Trumpf Lasertechnik) | |
Diagnostics: | laser power meter, substrate power meter, substrate beam profiler, fast photodiode | |
Other line sizes and other configurations on request. | ||