VOLCANO® Line Beam 750G - INNOVAVENT Laseroptics

e-mail: info@innovavent.com - phone: +49 551-900 47-0

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VOLCANO® Line Beam 750G


Laser Optics for a pulsed 532 nm Gaussian Laser Line  up to 750 mm length @ 10 kHz
The VOLCANO® LB (Line Beam) Laser Optics consists of a fiber coupled laser module and a separate optics module.


Long axis beam profile, p2p<=4%
lab
Scan axis beam profile
lab
VOLCANO® LB 750G with Procyon g1600
INNOVAVENT Lab set up for application testing
lab
Gen 6 GLA system with LB 750G Laser Optics
The laser beam emitted by an array of fibers is  processed by cylindrical collimation optics to provide the optimal illumination  of the homogenizer cylinder lens arrays. The VOLCANO® LB Laser Optics is  equipped with the FALCON® XXL cylinder projection lens. This projection lens gives a working distance of ~200mm at a demagnification of 10x (NA=0.25). The 10x FALCON® XXL cylinder p-lens demagnifies the intermediate image in the small axis  to 25-35 µm FWHM at the substrate. The line length can be arranged up to 750mm. The optics is operated with the  Procyon g1600, or Procyon  g2000, 532 nm, 1600/2000W (Powerlase Photonics  Ltd., UK). The laser light is coupled into fibers and  provided to the optics module over a distance of up to 30 m.

This multiplexing of laser oscillators provides an  outstanding  p2p stability, a line homogeneity of σ~0,5% (p2p ~3%) and a convenient and  reliable decoupling of laser and Gaussian line beam optics.
           
Scope  of Application
VOLCANO®  LB Laser Optics is applied for annealing and crystallization of thin semiconductor films, e.g. amorphous silicon films. Thin 50-70 nm a-Si films play an important  role for the manufacture of thin film transistors (TFT) in LCD and OLED flat panel displays. The green laser crystallization converts the amorphous silicon to poly-Si  which allows short response time TFTs for high performance flat panel displays.  The VOLCANO® LB Laser Optics provides a line length up to 750 mm length generating ELA (Excimer Laser Annealing) type   p-Si films (50-100 cm²/Vs). These films are well suited for the TFT  matrix of LCD displays.

VOLCANO® LB Laser Optics has high availability  (>90 %), is reliable and has low cost of ownership (<20% of an  excimer laser based ELA system of the same throughput).   
        
Features
VOLCANO® LB 200G
Procyon g600 fiber coupled, FALCON® 200XXL
Projection lens (cyl.), 200mm long and 30µm wide
line (FWHM) up to   500mJ/cm², 60-100ns
VOLCANO® LB 470G
Procyon g1400 fiber coupled, FALCON® 470XXL
Projection lens (cyl.), 470mm long and 30µm wide
line (FWHM) up to   500mJ/cm², 60-100ns
VOLCANO® LB 750G
Procyon g1600/g2000 fiber coupled, FALCON® 750XXL
Projection lens (cyl.), 750mm long and 30µm wide
line (FWHM) up to   400-500J/cm², 60-100ns


Technical Data VOLCANO® LB 200G
Line length:
200 mm (95%), other line length on request
Homogeneity:
6 sigma <=5 %
Wavelength:
532 nm, other wavelength on request
Line width:
20-30 µm FWHM or larger
Energy density:
>=500 mJ/cm² @ 600W (6 x 10mJ, 10kHz)
Attenuator:
polarization type, 5 - 95 %
Laser:
Procyon g600

Pulse length:
60-100 ns, longer by pulse delay control

Beam profiler:
CCD camera with microscope objective



Technical Data VOLCANO® LB 750G
Line length:
750 mm (95%), other line length on request
Homogeneity:
6 sigma <=5 %
Wavelength:
532 nm, other wavelength on request
Line width:
30 µm FWHM or larger
Energy density:
>=400 mJ/cm² @ 1600W (8 x 20mJ, 10kHz)
>=500 mJ/cm² @ 2000W (10 x 20mJ, 10kHz)
Attenuator:
polarization type, 5 - 95 %
Laser:
Procyon g1600, Procyon g2000

Pulse length:
60-100 ns, longer per pulse delay control

Beam profiler:
CCD camera with microscope objective




VOLCANO® LB Laser Optics include an integrated attenuator module to adjust the energy  density at the substrate level. Power meter heads and a CCD camera  based beam profile measurement tool are available.

Delivery  Restrictions
The Procyon  lasers are a dual-use good according to EG 428/2009 and EU 388/2012.



Germany, Europa
INNOVAVENT GmbH
Reinhard-Rube Str. 4
37077 Göttingen, Germany
phone: +49-551-90047-0
fax:      +49-551-90047-19
e-mail: info@innovavent.com
www.innovavent.com


Germany, Europa
INNOVAVENT GmbH
Reinhard-Rube Str. 4
37077 Göttingen, Germany
phone: +49-551-90047-0
fax:      +49-551-90047-19
e-mail: info@innovavent.com
www.innovavent.com
Taiwan (ROC) and China (PRC)
SuperbIN Company. .Ltd
1F, No. 320, Sec. 1 Nei-Hu Road Taipei,
11493, Taiwan (ROC)
phone: +886-2-2657-0678
fax:      +559-2-2657-0388
e-mail: info@superbin.com.tw
www.superbin.com.tw
Japan Optopia Co. Ltd.
611 West Tower
Kanagawa Science Park
3-2-1 Sakato Taksutu Kawasaki
Kanagawa, Japan 213-0012
phone: +81 44 812 5911
fax:      +81 44 812 5921
www.optopia.co.jp
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Customer Support Center Germany for: EO Technics Co., Ltd. 91 Dongpyeonro Anyang, Korea 431-803
© 2003 - 2017 INNOVAVENT Laseroptics - Last Update: 2016 12 19
Customer Support Center Germany for:
EO Technics Co., Ltd. 91 Dongpyeonro Anyang,
Korea 431-803
© 2003 - 2017 INNOVAVENT Laseroptics
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