Laser Optics for a Laser Line of 100mm Length using Pulsed Solid State UV Lasers
The VOLCANO® 100UV Laser Optics is built into a solid granite structure. The beam is homogenized into a 100mm long line beam with a typical width of 20 - 30µm. The FALCON 100UV projection lens assures a uniform line width and the large depth of focus which trouble-free production requires. A single TruMicro 8320 laser (200W, 10 kHz, 15-20ns) provides 20mJ pulse energy and gives an energy density of more than 400mJ/cm² in a 30µm FWHM line width, respectively the width can be expanded to 80µm for 150mJ/cm². Using a typical scan pitch of 50% of the FWHM the scan speed goes up to 400mm/s. Alternative laser sources operated at 355nm can be applied as well. However, the longer pulse duration of 50-70ns requires increased process energy density.
Scope of Application
Laser-Lift-Off processes are in use in the electronics industry for the production of flexible OLED displays for TV products, smartphones, smartwatches and tablet computers. The OLED display is manufactured on a flexible polymer foil on a glass substrate. The final polymer foil with the OLED display is lifted off the glass using the UV laser line.
|Technical Data VOLCANO® 100UV-1|
20-30µm FWHM (Gaussian profile)
p2p ≤ 6% best focus
≥ 630mJ/cm² @ 20µm FWHM; ≥ 420mJ/cm² @ 30µm FWHM
TruMicro 8320 (Trumpf Lasertechnik)
laser power meter, substrate power meter, substrate beam profiler, fast photodiode
Other line sizes and other configurations on request.