VOLCANO® Line Beam 750G
Systems > Solid State Laser Annealing
Laser Optics for a pulsed 532 nm Gaussian Laser Line up to 750 mm length @ 10 kHz
The VOLCANO® LB (Line Beam) Laser Optics consists of a fiber coupled laser module and a separate optics module.
Long axis beam profile, p2p<=4%
Scan axis beam profile
VOLCANO® LB 750G with Procyon g1600
INNOVAVENT Lab set up for application testing
Gen 6 GLA system with LB 750G Laser Optics
The laser beam emitted by an array of fibers is processed by cylindrical collimation optics to provide the optimal illumination of the homogenizer cylinder lens arrays. The VOLCANO® LB Laser Optics is equipped with the FALCON® XXL cylinder projection lens. This projection lens gives a working distance of ~200mm at a demagnification of 10x (NA=0.25). The 10x FALCON® XXL cylinder p-lens demagnifies the intermediate image in the small axis to 25-35 µm FWHM at the substrate. The line length can be arranged up to 750mm. The optics is operated with the Procyon g1600, or Procyon g2000, 532 nm, 1600/2000W (Powerlase Photonics Ltd., UK). The laser light is coupled into fibers and provided to the optics module over a distance of up to 30 m.
This multiplexing of laser oscillators provides an outstanding p2p stability, a line homogeneity of σ~0,5% (p2p ~3%) and a convenient and reliable decoupling of laser and Gaussian line beam optics.
Scope of Application
VOLCANO® LB Laser Optics is applied for annealing and crystallization of thin semiconductor films, e.g. amorphous silicon films. Thin 50-70 nm a-Si films play an important role for the manufacture of thin film transistors (TFT) in LCD and OLED flat panel displays. The green laser crystallization converts the amorphous silicon to poly-Si which allows short response time TFTs for high performance flat panel displays. The VOLCANO® LB Laser Optics provides a line length up to 750 mm length generating ELA (Excimer Laser Annealing) type p-Si films (50-100 cm²/Vs). These films are well suited for the TFT matrix of LCD displays.
VOLCANO® LB Laser Optics has high availability (>90 %), is reliable and has low cost of ownership (<20% of an excimer laser based ELA system of the same throughput).
Features
VOLCANO® LB 200G
Procyon g600 fiber coupled, FALCON® 200XXL
Projection lens (cyl.), 200mm long and 30µm wide
line (FWHM) up to 500mJ/cm², 60-100ns
VOLCANO® LB 470G
Procyon g1400 fiber coupled, FALCON® 470XXL
Projection lens (cyl.), 470mm long and 30µm wide
line (FWHM) up to 500mJ/cm², 60-100ns
Procyon g1400 fiber coupled, FALCON® 470XXL
Projection lens (cyl.), 470mm long and 30µm wide
line (FWHM) up to 500mJ/cm², 60-100ns
VOLCANO® LB 750G
Procyon g1600/g2000 fiber coupled, FALCON® 750XXL
Projection lens (cyl.), 750mm long and 30µm wide
line (FWHM) up to 400-500J/cm², 60-100ns
Procyon g1600/g2000 fiber coupled, FALCON® 750XXL
Projection lens (cyl.), 750mm long and 30µm wide
line (FWHM) up to 400-500J/cm², 60-100ns
| Technical Data VOLCANO® LB 200G | ||
Line length: | 200 mm (95%), other line length on request | |
| Homogeneity: | 6 sigma <=5 % | |
| Wavelength: | 532 nm, other wavelength on request | |
| Line width: | 20-30 µm FWHM or larger | |
| Energy density: | >=500 mJ/cm² @ 600W (6 x 10mJ, 10kHz) | |
| Attenuator: | polarization type, 5 - 95 % | |
Laser: | Procyon g600 | |
| Pulse length: | 60-100 ns, longer by pulse delay control | |
| Beam profiler: | CCD camera with microscope objective | |
| Technical Data VOLCANO® LB 750G | ||
Line length: | 750 mm (95%), other line length on request | |
| Homogeneity: | 6 sigma <=5 % | |
| Wavelength: | 532 nm, other wavelength on request | |
| Line width: | 30 µm FWHM or larger | |
| Energy density: | >=400 mJ/cm² @ 1600W (8 x 20mJ, 10kHz) >=500 mJ/cm² @ 2000W (10 x 20mJ, 10kHz) | |
| Attenuator: | polarization type, 5 - 95 % | |
Laser: | Procyon g1600, Procyon g2000 | |
| Pulse length: | 60-100 ns, longer per pulse delay control | |
| Beam profiler: | CCD camera with microscope objective | |
VOLCANO® LB Laser Optics include an integrated attenuator module to adjust the energy density at the substrate level. Power meter heads and a CCD camera based beam profile measurement tool are available.
Delivery Restrictions
The Procyon lasers are a dual-use good according to EG 428/2009 and EU 388/2012.